Process	Purpose	Step 1	Step 2	Step 3	Step 4	Step 5	Step 6	Step 7
Pre Diffusion Clean	Removal of light organics,silicon dioxide layer, particles, metals; protective oxide regrowth	HF (50:1) PVDF or Natural Polypro  Ambient Static Bath	Rinse PVDF QDR  Bath	SC1 Quartz Heated Filtered Bath  Optional Megasonics	Rinse PVDF QDR  Bath	SC2 Quartz Heated Filtered Bath	Rinse PVDF QDR  Bath	Dry IPA Vapor Dryer
Nitride Etch	Etch Silicon Nitride Layer	HF (50:1) PVDF or Natural Polypro Ambient Static Bath	Rinse PVDF QDR Bath	Phosphoric Acid Quartz Nitride Etch	Rinse PVDF QDR Bath	SC1 Quartz Heated Filtered Bath  Optional Megasonics	Rinse PVDF QDR Bath	Dry IPA Vapor Dryer
Pre Gate Clean	Removal of light organics, silicon dioxide layer, and metals.	HF (50:1) PVDF or Natural Polypro Ambient Static Bath	Rinse PVDF QDR Bath	SC2 Quartz Heated Filtered Bath	Rinse PVDF QDR Bath	Dry IPA Vapor Dryer
Pre-metal Clean	Removal of light organics, particles, and silicon dioxide layer.	SC1 Quartz Heated   Filtered Bath    Optional Megasonics	Rinse  PVDF QDR Bath	HF (50:1) PVDF or Natural Polypro Ambient Static Bath	Rinse PVDF QDR Bath	Dry IPA Vapor Dryer
Oxide Etch	Silicon etch, Polysilicon etch, Silicon Dioxide removal	HF PVDF Constant Temperature Bath	Rinse PVDF QDR Bath	BOE PVDF Constant Temperature Bath	Rinse PVDF QDR Bath	Dry IPA Vapor Dryer
Photoresist Strip, Post Ash Clean, Post Implant Resist Strip, Post Etch Resist Strip (Optional SC1)	Positive Photoresist removal without etching silicon, dilicon dioxide, silicon nitride or SOI for nonmetal applications	SPM (a.k.a. Piranha or Caro's Acid) Quartz Static Heated Bath	Rinse PVDF QDR Bath	SPM         (a.k.a. Piranha or Caro's Acid)  Quartz Static Heated Bath	Rinse PVDF QDR Bath	Dry IPA Vapor Dryer
Metal Liftoff	Negative removal of photoresist, metal	NMP Stainless Steel Heated Downflow Bath	NMP Stainless Steel Ultrasonic Bath	Acetone Stainless Steel Ambient Filtration Bath	IPA Stainless Steel Ambient Filtration Bath	Dry IPA Vapor Dryer
KOH Etch	Bulk Silicon Etch	Sulfuric Quartz Static Heated Bath	Rinse PVDF QDR Bath	KOH Quartz Heated Filtered Bath	Rinse PVDF QDR Bath	Dry IPA Vapor Dryer