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Bell Jar Cleaner
JST's Bell Jar Chamber Cleaner utilizes
a proven chemical spray process increasing your Reactors up time!
Standard Features
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Oscillating Chemical & DI Water Spray Manifods
- On Board Chemical Storage Reservoirs with Filtration
- Purged Electrical Compartments
- Secondary Containment with Leak Detection
- Meets All Applicable SEMI Safety Codes
- Safety Interlocked Sliding Seal Doors
- PLC Recipe Driven Control
- Factory Mutual 4910 Listed Materials
Full spray coverage ensures uniform etching and thorough rinsing of the bell jar and process chamber.
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