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IPA Vapor Dryer
  

JST's "CLV" Dryer utilizes a patented, environmentally friendly, ultra clean technology for precision drying of silicon wafers, III-V Compound wafers,  glass substrates, disc drives, optic lenses and many other products.

Precision drying is critical for maintaining the cleaning process. JST's CLV is a hybrid of two proven technologies: vacuum drying and isopropyl alcohol (IPA) drying. JST's CLV Dryer utilizing the best features of both in an effective closed loop process. Ultra clean vapor is remotely generated and then introduced into a sealed drying chamber. The closed loop system allows fresh IPA vapor to rinse the surface to be dried,  penetrating the surface areas and absorbing the moisture. A low pressure vacuum pulls any remaining moisture from the sealed chamber and away from the product being dried. 

  • 10 Minute Dry Cycle
  • 60 cc IPA per Cycle
  • Particle Neutral Drying to 0.16  

At the end of the drying cycle the chamber is backfilled with argon or nitrogen gas so that the cleaned, dried product is removed from a virtually inert atmosphere.

    Options

  • Charcoal Filter
  • Color User Interface Panel
  • Bulk Chemical Dispense

    Safety

  • Meets FM Requirements
  • No Vapor Present during Load/Unload
  • Sealed Vessel with Closed Loop Process
  • Low Emissions (less than 1 lb per day)
  • Indirect Heating of IPA
  • CO2 Fire Suppression System
  • Automated Lid with Safety Interlocks
  • Meets NFPA Class I Div II 

   Drying Aplications

  • Silicon Wafer
  • III-Compound Wafer
  • MEMS
  • Glass Substrates
  • Disc Drives
  • Optics and more     

    Facility Requirements  

  • Industrial Grade PLC
  • Modular design for quick replacements and minimal down time
  • Interactive Touch Screen Interface
  • Alarm Indicator Screens for easy troubleshooting
  • Multi-level Menu Design
  • Flexible process adjustment
  • Visual process flow during recipe operation
  • Multi level security structure
  • Independent CO2 Fire

   Controls

  • Industrial Grade PLC
  • Modular design for quick replacements and minimal down time
  • Interactive Touch Screen Interface
  • Alarm Indicator Screens for easy troubleshooting
  • Multi-level Menu Design
  • Flexible  Process Adjustment
  • Visual process flow during recipe operation
  • Multi level Security Structure
  • Independent CO2 Fire Controller interlocked to master PLC control  

 
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email: info@jstmfg.com | 219 E. 50th St. Boise, ID 83714 | 800-391-0371