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JST's Exhausted Workstations are designed for manual processing of 8" wafers or smaller in a class 100 or better environment. They have been certified to meet SEMI S2 and SEMI S8 requirements and the exhaust flow system has been independently certified to meet industrial ventilation requirements thru ASHRAE testing. The headcasing houses the electrical controls and is nitrogen purged. Emergency Power Off (EPO) is tied into the exhaust failure system and shuts down the power if exhaust fails. |
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JST's VLF is designed for manual processing of 6" or smaller wafers in a class 1,000 environment. The headcasing houses the electrical controls and is nitrogen purged. The Emergency Power Off (EPO) is located in the headcasing and shuts the power down if exhaust fails. These units have been certified to meet industrial ventilation requirements thru ASHRAE testing. |
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JST's Fumehoods are modular in design and made to provide a safe enviroment when working with volatile chemistries. The fumehood profile encloses the entire work area. A counter balanced front shield design makes for ease in raising and lowering the shield. Low CFM exhaust reduces facility costs.
The unit above is shown with an ergo column to meet SEMI requirements for reaching controls. |
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